integrated microelectronics, optoelectronics, micro-opto-electro-mechanical systems (MOEMS), micro- and nano-technology
keywords:
silicon technology, silicon detectors, microsensors, ASIC's, MPW service
Micromachined silicon microprobes.
Photolitgraphy Clean Room.
SNOM/AFM nanoprobe integrated with piezoresistive cantilever.
Research focus of the Centre:
The activity of MANTARC centre focuses on applied research in the field of integrated microelectronic, micromechanical and optoelectronic systems and devices. The Centre aims at becoming a national resource for applications of MEMS/MOEMS microtechnologies in order to meet scientific and technical challenges of the industry. The centre focuses its efforts on improvement of links with universities and research centres in Poland, EU Member States and NAS towards further integration within European Research Area, support for leading edge multidisciplinary research focused on application of micro- and nanotechnology, as well as strong support for educational activities.
The most important topics of the research and development activities include:
development of new electrical, photoelectrical and SEM/TEM methods for determination of physical parameters of semiconductor structures,
photodetectors including silicon avalanche photodiodes,
silicon sensors for physical and chemical quantities,
nuclear radiation detectors,
micro- and nano-probes for 3D surface analysis with scanning atomic force microscopy,
analogue and digital specialised integrated circuits and systems, including Application Specific Integrated Circuits (ASIC's) and Systems on Chip (SoC),
integrated circuits cores in the form of behavioral descriptions submitted electronically as Intellectual Property Blocks.
Polish research projects currently run in the Centre:
The Centre is participating in realisation of two contracted research projects:
"Development of Technology of High Efficient Single-Crystal Solar Cells in Microelectronics Technology" and
"Total Analysis System for Multicomponent Media Analysis".
The Centre is also running 1 project supported by American-Polish 2nd Maria Skłodowska-Curie Fund, 3 research grants funded by State Committee of Scientific Research as well as 5 statutory research projects.
European research projects currently run in the Centre:
The Centre is participating in 6 projects under the 5-th Framework Programme of the European Union:
E-COLLEG, IST-1999-11746, Advanced Infrastructure for Pan-European Collaborative Engineering,
ROBOSEM, GRD1-2001-41861, Development of Smart Nanorobot for Sensor-based Handling in a Scanning Electron Microscope,
SEWING, IST-2000-28084, System for European Water Monitoring,
SUCIMA, GRD2-2000-31832, Silicon Ultra Fast Cameras for Electron and Gamma Sources in Medical Applications,
MOEMS CENTRE, IST-2001-33444, A European Network of Competencies in "MOEMS" Devices and Technologies,
REASON, IST-2000-30193, Research and Training Action for System on Chip Design.
Quality:
Superior qualifications of scientific staff, motivation, international contacts, wide scope of basic and market oriented applied research together with unique facilities and equipment resulted with many prestigious achievements. The most important results within the last years are as follows:
The scientific results of the research works were widely published in international scientific journals and presented at conferences. Since the year 2000, our research teams published 216 papers, 35 of which in journals selected by the Institute for Scientific Information, Philadelphia, USA;
The developed products have been awarded many nation-wide prizes and favors. The most important include: Economic Award of the President of the Republic of Poland for the best invention of the year, twice the 1-st category award of the Polish High Technical Association as well as the Polish Product of the Future award and medals on hi-tech fairs.
Broad international co-operation with both scientific institutions and comercial enterprises confirms the european level of RTD activities of the Centre.
The Centre is a member of EUROPRACTICE initiative as a partner of competence centre for microsystems fabrication offering access to advanced MOEMS technologies for industrial organisations.
Equipment:
The Centre is equipped with complete silicon processing facility (equipment, clean rooms, supply infrastructure) used for developing and manufacturing semiconductor structures for various research projects. It also has a potential of the small scale fabrication of optoelectronic, microelectronic and micromechanical devices with moderate lithography resolution. Assembly and packaging facilities allow to IC design potential include about dozen SUN workstations and several modern software tools like CADENCE, Mentor Graphics, Synopsys, Xilinx, HSPISE. Process and device simulation tools are: SAMCEF, CFDRC, TCAD, ATHENA and ATLAS. Most important unique characterisation tools are: IC's Digital Testers, Environmental Chambers, Multifunctional System for Photoelectric Measurements of Semiconductor Structures, Variable Angle Spectroscopic Ellipsometer, UV-Laser, Interferometer Fizeaux for Curvature Analysis, System for Probe Complex Characterisation of APD structures.
Human resources:
The permanent staff of the Centre consists of 53 scientists (2 full professors, 1 associate professor, 14 Ph.D.'s, 28 engineers and 8 assistants) and 26 technicians.
Training possibility:
MANTARC will facilitate access to semiconductor technology (including sensor, microsystem and IC technology) for university researchers and students. Such access means (but is not limited to) making prototypes of integrated circuits (MPW service) at affordable prices, accepting orders for processing of nonstandard semiconductor structures etc. This will help attracting more students to these fields of engineering, raise the education level and also open new possibilities for experimental research. The Centre will offer its services to every interested university in Central/Eastern Europe.
In the ITE, there exists an organisational basis for Ph.D. and D.Sc. oriented research and granting the scientific degrees. ALos, ITE is authorised to confer PhD and D.Sc. Degrees. With this opportunity and with the experienced scientific staff of the Institute, there is a possibility of attracting Ph.D. students wishing to work in the scientific direction of the semiconductor microelectronics.
Scientific co-operation:
Research teams working in the Centre, apart of 5FP activities, co-operate with many research and scientific institutions all over the world. The most important are:
CERN, Geneva, Switzerland
PHASE CNRS, Geneva, Switzerland
Max-Plank Institute, Stuttgart, Germany
Acreo AB, Kista, Sweden
IMEC Leuven, Belgium
Tel Aviv University, Israel
Imperial College, London, UK
Instituto Nazionale di Fisica Nucleare, Italy
Bell Labs Lucent Technologies, USA
Naval Resarch Labs, Washington D.C., USA
Kassel University, Germany
Institut fuer Strahlenschutz, Neuherberg, Germany
North Carolina State University, Raleigh, USA.
Domestic:
Warsaw University of Technology
Technical University of Łódź
Wrocław University of Technology
University of Mining and Metallurgy, Cracow
Warsaw University
Institute of Physics, Polish Academy of Sciences, Warsaw
Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Warsaw
Industrial Institute of Electronics, Warsaw
Institute of Electronic Materials Technology, Warsaw
Co-operation with industrial partners:
An applied research directed into new product development is of great importance among the Centre activities. Family of avalanche photodetectors (APD's) with active area diameter from 0,3 to 3mm are exported to USA. Specialized double Zener structures are exported to Germany. Application Specific Integrated Circuits (ASIC's): DES cryptographic processor, fire guard system controller, time relays and entrance systems controllers are supplied to domestic customers. Silicon photocells, selective detectors of UV radiation, strip and pixel radiation detectors are produced for nuclear physic community including CERN researchers. Cryptographic processors cores: DES, 3DES, IDEA, RSA as well as sigma-delta converter and signal processor are submitted electronically as reusable Intellectual Property (IP) elements. Photovoltaic infrared detectors, pressure sensors and ISFET chemical sensors are also developed and produced. The most important industrial partners are: Advanced Photonics Inc. USA, GSF - Forschung.
Zentrum fur Umwelt und Gesundheit Gmbh Germany, WaveBand Corp. USA, SECOS Germany, ACCENTUS UK, Sagantec Israel, Semiconductor Complex Ltd India as well as domestic: ALSTOM T&D Świebodzice, POLON ALFA Bydgoszcz, PROEL Warszawa, COMP Warszawa, Techlab 2000 Warszawa, Simex Gdańsk, OPTIX Warszawa.